05642015 is referenced by 241 patents and cites 12 patents.

An electromechanical transducer having a substrate bearing a plurality of elastomeric microstructures with a microelectrode on each microstructure. A power supply is connected to the microelectrodes for controlled application to them of an electrical potential which alternately induces forces of attraction between adjacent pairs of microelectrodes, causing controlled, time-varying displacement of the microelectrodes. Alternatively, a further plurality of microelectrodes (or one or more macroelectrodes) are elastomerically supported above the microelectrodes, with the power supply being connected to the macroelectrode(s) such that the electrical potential applied between the microelectrodes and macroelectrode(s) alternately induces forces of attraction between the microelectrodes and macroelectrode(s), causing controlled, time-varying displacement of the microelectrodes relative to the macroelectrode(s). The macroelectrode(s) can also be applied to a side of the substrate opposite the microstructures.

Title
Elastomeric micro electro mechanical systems
Application Number
91009
Publication Number
5642015
Application Date
May 1, 1995
Publication Date
June 24, 1997
Inventor
Brent J Bolleman
Vancouver
CA
Lorne A Whitehead
Vancouver
CA
Agent
Oyen Wiggs Green & Mutala
Assignee
The University of British Columbia
CA
IPC
H02N 1/08
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