05629918 is referenced by 99 patents and cites 9 patents.

A surface micromachined micromagnetic actuator is provided with a flap capable of achieving large deflections above 100 microns using magnetic force as the actuating force. The flap is coupled by one or more beams to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate. The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.

Title
Electromagnetically actuated micromachined flap
Application Number
8/377018
Publication Number
5629918
Application Date
January 20, 1995
Publication Date
May 13, 1997
Inventor
Yu Chong Tai
Pasadena
CA, US
Tom Tsao
Pasadena
CA, US
Chang Liu
Pasadena
CA, US
Amish Desai
Pasadena
CA, US
Raanan Miller
Pasadena
CA, US
Jeremy Tzong Shyng Leu
Plainsboro
NJ, US
Denny K Miu
Valencia
CA, US
Chih Ming Ho
Rancho Palos Verdes
CA, US
Agent
Daniel L Dawes
Assignee
California Institute of Technology
CA, US
The Regents of the University of California
CA, US
IPC
B44C 1/22
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