05618349 is referenced by 48 patents and cites 11 patents.

A process tube is surrounded by a heater. A number of gas inlet holes and a number of gas outlet holes are formed in the side wall of the process tube, the gas inlet and outlet holes facing each other and formed distributed in the longitudinal direction of the process tube. An oxidizing gas is supplied from a gas supply pipe to the gas inlet holes, and exhausted to a gas exhaust pipe via the gas outlet holes or lower gas outlet holes.

Title
Thermal treatment with enhanced intra-wafer, intra-and inter-batch uniformity
Application Number
8/279744
Publication Number
5618349
Application Date
July 22, 1994
Publication Date
April 8, 1997
Inventor
Tomohiro Yuuki
Hamamatsu
JP
Agent
Loeb & Loeb
Assignee
Yamaha Corporation
JP
IPC
C23C 16/00
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