05583688 is referenced by 433 patents and cites 5 patents.

An improved hidden hinge digital micromirror device, and method of making the same, having hinges 424 attached to a yoke 428 which limits the rotation of the device mirror 430. In one embodiment, the mirror 430 is supported by a center support post 416 attached to two torsion hinges 424 by a landing hinge yoke 428. The ends of the torsion hinges 424 are attached to two support posts 426 which hold the hinges 424 above the substrate 400 and allow the hinges 424 to twist in a torsional fashion. The device is fabricated using two sacrificial spacer layers 404, 414 which are removed to allow the mirror 430 to rotate.

Title
Multi-level digital micromirror device
Application Number
8/171303
Publication Number
5583688
Application Date
December 21, 1993
Publication Date
December 10, 1996
Inventor
Larry J Hornbeck
Van Alstyne
TX, US
Agent
Richard L Donaldson
Charles A Brill
James C Kesterson
Assignee
Texas Instruments Incorporated
TX, US
IPC
G02B 26/00
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