05559428 is referenced by 118 patents and cites 27 patents.

The change in thickness of a film on an underlying body such as a semiconductor substrate is monitored in situ by inducing a current in the film, and as the thickness of the film changes (either increase or decrease), the changes in the current are detected. With a conductive film, eddy currents are induced in the film by a generating an alternating electromagnetic field with a sensor which includes a capacitor and an inductor.

Title
In-situ monitoring of the change in thickness of films
Application Number
8/419206
Publication Number
5559428
Application Date
April 10, 1995
Publication Date
September 24, 1996
Inventor
Tony F Heinz
Chappaqua
NY, US
Arnold Halperin
Cortlandt Manor
NY, US
Steven G Barbee
Dover Plains
NY, US
Leping Li
Poughkeepsie
NY, US
Agent
Alison D Mortinger
Assignee
International Business Machines Corporation
NY, US
IPC
G01R 27/00
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