05559358 is referenced by 371 patents and cites 13 patents.

The present invention relates to microstructures fabricated from semiconductor material and having a flexible member which is excited into various modes of resonance and in which such resonance is read optically. By coupling the microstructure to a surface or material of interest, a drive means will excite the flexible member into a characteristic resonance which when read optically gives indication of certain physical phenomena influencing the surface or material of interest. The microstructures of the present invention may be configured to self-resonate, as a so-called active device, under certain conditions. Many different physical phenomena may be quantified using the device of the present invention.

Title
Opto-electro-mechanical device or filter, process for making, and sensors made therefrom
Application Number
67872
Publication Number
5559358
Application Date
May 23, 1994
Publication Date
September 24, 1996
Inventor
James D Zook
Minneapolis
MN, US
Henry Guckel
Madison
WI, US
David W Burns
Minneapolis
MN, US
Agent
Ian D Mackinnon
Assignee
Honeywell
MN, US
IPC
H01L 29/82
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