05552925 is referenced by 236 patents and cites 4 patents.

A micro-mechanical shutter array using micro-mechanical technology and silicon-on-transparent-substrate technology. The micro-mechanical shutter array is operated by using electro-static forces. Two basic types of shutter movements are described, viz. an electric force/electric counter-force and an electric force/mechanical (spring) counter-force.

Title
Electro-micro-mechanical shutters on transparent substrates
Application Number
8/117532
Publication Number
5552925
Application Date
September 7, 1993
Publication Date
September 3, 1996
Inventor
Eugene R Worley
Irvine
CA, US
Agent
G Donald Weber Jr
Assignee
John M Baker
CA, US
IPC
G02B 26/02
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