05550373 is referenced by 273 patents and cites 8 patents.

A monolithically constructed infrared, tunable Fabry-Perot cavity filter-detector for spectroscopic detection of particular substances having an absorption line in the wavelength range from 2 to 12 microns. The filter-detector has a hermetically sealed Fabry-Perot cavity that has a mirror which has an adjustable distance relative to another mirror of the cavity. The former mirror is adjusted by piezoelectric film on the mirror support or with piezoelectric stacks or wall supporting the mirror. There may be electrodes situated near the mirrors for capacitive sensing of the distance between the mirrors. Light to be filtered and detected comes in through a window wafer which may have diffractive or refractive microlenses, plus an optional spatial filter. After passing through the window wafer, the light is filtered by the tunable mirrors of the Fabry-Perot cavity. The portion of the light that is passed by the cavity is detected by an infrared microbolometer or a CCD array. The cavity and detector are hermetically sealed in a vacuum.

Title
Fabry-Perot micro filter-detector
Application Number
8/367491
Publication Number
5550373
Application Date
December 30, 1994
Publication Date
August 27, 1996
Inventor
Robert D Horning
Burnsville
MN, US
Bernard S Fritz
Eagan
MN, US
Barrett E Cole
Bloomington
MN, US
Agent
John G Shudy Jr
Assignee
Honeywell
MN, US
IPC
G01J 3/45
G01B 9/02
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