05548405 is referenced by 9 patents and cites 1 patents.

An apparatus for measuring a three-dimensional shape of an object to be measured provided with a fitting portion, comprises: a body base; a rotation stage set on the base; an XY stage set on the rotation stage and provided with a fitting portion, the XY stage being movable in a predetermined horizontal direction and in a horizontal direction perpendicular thereto independently of rotation of the rotation stage; a drive control device for independently driving and controlling the rotation stage and XY stage; a holding device for holding the object to be measured, the holding device being provided with a fit portion to fit with the fitting portion of the XY stage, and a fit portion to fit with the fitting portion of the object to be measured; an R stage set above the holding device, the R stage being movable in a horizontal direction and in a direction of the diameter of the rotation stage; a first optical displacement gage provided on a lower surface of the R stage so that an optical axis thereof becomes parallel to a rotational axis of the rotation stage; a Z stage provided beside the holding device, the Z stage being movable in a direction parallel to the rotational axis; and a second optical displacement gage provided on a side surface of the Z stage so that an optical axis thereof becomes perpendicular to the rotational axis of the rotation stage.

Title
Optical three-dimensional shape measuring apparatus having a device for accurately positioning and measuring an object
Application Number
8/360040
Publication Number
5548405
Application Date
December 20, 1994
Publication Date
August 20, 1996
Inventor
Kazutoshi Motosugi
Tama
JP
Assignee
Nikon Engineering
JP
Nikon Corporation
JP
IPC
G01B 11/24
View Original Source