05535047 is referenced by 444 patents and cites 16 patents.

A spatial light modulator (10) of the DMD type having increased performance parameters. A pixel mirror (30) is supported by a yoke (32), whereby electrostatic attraction forces (70, 76, 80, 82) are generated between several structures. First, between the elevated mirror (30) and an elevated address electrode (50, 52). Second, between the yoke (32) and an underlying address electrode (26, 28). The pixel (30) achieves high address torque, high latching torques, high reset forces, and greater address margins over previous generation devices. The proximity of the yoke (32) over the substrate address electrodes (26, 28) realizes large attraction forces whereby the pixel is less susceptible to address upset, requires lower reset voltages and provides higher switching speeds.

Title
Active yoke hidden hinge digital micromirror device
Application Number
8/424021
Publication Number
5535047
Application Date
April 18, 1995
Publication Date
July 9, 1996
Inventor
Larry J Hornbeck
Van Alstyne
TX, US
Agent
Richard L Donaldson
James C Kesterson
Robert C Klinger
Assignee
Texas Instruments Incorporated
TX, US
IPC
G02B 26/00
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