05502306 is referenced by 177 patents and cites 28 patents.

There is disclosed numerous embodiments of a method and apparatus for a particle scanning system and an automatic inspection system. In each of these a particle beam is directed at the surface of a substrate for scanning that substrate. Also included are a selection of detectors to detect at least one of the secondary particles, back-scattered particles and transmitted particles from the substrate. The substrate is mounted on an x-y stage to provide it with at least one degree of freedom while the substrate is being scanned by the/particle beam. The substrate is also subjected to an electric field on it's surface to accelerate the secondary particles. The system also has the capability to accurately measure the position of the substrate with respect to the charged particle beam. Additionally, there is an optical alignment means for initially aligning the substrate beneath the,particle beam means. To function most efficiently there is also a vacuum means for evacuating and repressurizing a chamber containing the substrate. The vacuum means can be used to hold one substrate at vacuum while a second one is being loaded/unloaded, evacuated or repressurized. Alternately, the vacuum means can simultaneously evacuate a plurality of substrates prior to inspection and repressurize of the same plurality of substrates following inspection. In the inspection configuration, there is also a comparison means for comparing the pattern on the substrate with a second pattern.

Title
Electron beam inspection system and method
Application Number
710351
Publication Number
5502306
Application Date
March 17, 1994
Publication Date
March 26, 1996
Inventor
Eric Munro
London
GB
Chris Kirk
Beconsfield Bucks
GB
Chetana Bhaskar
San Jose
CA, US
Chung Shih Pan
Palo Alto
CA, US
David J Clark
Atherton
CA, US
Timothy L Hutcheson
Los Gatos
CA, US
Yen Jen Oyang
Cupertino
CA, US
Hoi T Nguyen
Milpitas
CA, US
Chun C Lin
Cupertino
CA, US
Jack Y Jau
Fremont
CA, US
Henry Pearce Percy
Los Gatos
CA, US
Kirkwood Rough
San Jose
CA, US
Surendra Lele
Santa Clara
CA, US
April Dutta
Milpitas
CA, US
Sam Wong
San Jose
CA, US
Paul Wieczorek
San Jose
CA, US
Dean Walters
Napierville
IL, US
Lee Veneklasen
Castro Valley
CA, US
John Taylor
San Jose
CA, US
David E A Smith
San Mateo
CA, US
Richard Simmons
Los Altos
CA, US
Mike Robinson
San Jose
CA, US
Ray Paul
Palo Alto
CA, US
Barry Becker
San Jose
CA, US
John McMurtry
Menlo Park
CA, US
Ming Yie Ling
Sunnyvale
CA, US
Ralph Johnson
Los Gatos
CA, US
John Greene
Los Altos
CA, US
Dennis Emge
San Jose
CA, US
Hans Dohse
Pleasanton
CA, US
Anil Desai
San Jose
CA, US
Curt Chadwick
Los Gatos
CA, US
Alan D Brodie
Palo Alto
CA, US
Agent
Allston L Jones
Assignee
KLA Instruments Corporation
CA, US
IPC
H01J 37/26
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