05500761 is referenced by 314 patents and cites 3 patents.

A method and apparatus for modulating an optical signal using a micromechanical modulator are disclosed. The modulator comprises a membrane, which consists of at least one layer, and a substrate, spaced to form an air gap. The layers of the membrane are characterized in that there is a relationship between the refractive indices of the layers and the refractive index of the substrate. The membrane is suspended in a first position over the substrate by a flexible support arrangement. Bias is applied to the membrane and the substrate to create an electrostatic force to move the membrane towards the substrate to a second position. The reflectivity of the device to an optical signal changes as the membrane moves from the first position to the second position, thereby modulating the signal.

Title
Micromechanical modulator
Application Number
8/187676
Publication Number
5500761
Application Date
January 27, 1994
Publication Date
March 19, 1996
Inventor
James A Walker
Howell
NJ, US
Keith W Goossen
Aberdeen
NJ, US
Assignee
AT&T
NJ, US
IPC
G02B 26/00
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