05474410 is referenced by 80 patents and cites 14 patents.

A cassette carrier unit for carrying a cassette, in which a plurality of substrates are housed, into and out of cassette chambers of the multi-chamber system including a hand on which the cassette is mounted. A multi-joined arm for supports the swingable hand, and a base supports the multi-joined swingable arm. The multi-joined arm includes a first shaft member rotatably attached to the hand, a second shaft member rotatably attached to the base, a third shaft member rotated associating with the first shaft member but in a direction reverse to the direction in which the first shaft member is rotated, and a fourth shaft member rotatably attached to the base and to which rotation drive force is transmitted. A first arm is rotatably attached to the first shaft member at the front end thereof and to the second shaft member at the base end thereof. A second arm is arranged substantially parallel to the first arm and fixed to the third shaft member at the front end thereof and to the fourth shaft member at the base end thereof. When the first and second arms are swung, the hand is swung in a direction reverse to the direction in which the first and second arms are swung.

Title
Multi-chamber system provided with carrier units
Application Number
8/212821
Publication Number
5474410
Application Date
March 14, 1994
Publication Date
December 12, 1995
Inventor
Masao Kubodera
Yamanashi
JP
Masaki Narushima
Yamanashi
JP
Toshihiko Takasoe
Yamanashi
JP
Masanobu Kanazashi
Kofu
JP
Masami Mizukami
Yamanashi
JP
Masahito Ozawa
Yamanashi
JP
Agent
Oblon Spivak McClelland Maier & Neustadt
Assignee
Tel Varian
JP
IPC
B65G 1/06
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