05372851 is referenced by 49 patents and cites 7 patents.

This invention aims to form uniformly and effectively an ultra thin chemical adsorbing film having an excellent water repellent property, oil repellent property, and contamination-proof property on the surface of a substrate by chemically adsorbing in a gas phase atmosphere. A chemically adsorbed film can be formed on any type of substrate and in a short time by chemically adsorbing a chlorosilane based surface-active agent on the surface of a substrate having active hydrogen groups. Further, a chemically adsorbed monomolecular film, or a polymer film, can be formed on any type of substrate and in a short time by forming a siloxane based monomolecular film or a polysiloxane adsorbed film in a gas atmosphere having a chlorosilane based surface-active agent having plurality of chlorosilyl groups.

Title
Method of manufacturing a chemically adsorbed film
Application Number
7/984478
Publication Number
5372851
Application Date
December 2, 1992
Publication Date
December 13, 1994
Inventor
Hidetaka Higashino
Soraku
JP
Mamoru Soga
Osaka
JP
Norihisa Mino
Settu
JP
Kazufumi Ogawa
Hirakata
JP
Agent
Fish & Richardson
Assignee
Matsushita Electric Industrial
JP
IPC
C23C 14/24
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