05372652 is referenced by 27 patents and cites 7 patents.

An aerosol cleaning apparatus for cleaning a substrate includes an aerosol producing means having a nozzle head. The nozzle head is positioned at a selected proximity and orientation to the substrate which is held by a rotatable holder. The aerosol spray dislodges particles from the substrate and the rotation of the substrate further assists in the removal of the loosened particles. A method of aerosol cleaning includes rotating a substrate at a preselected speed and spraying an aerosol jet in conjunction with the rotation to help in the removal of particles from the substrate.

Title
Aerosol cleaning method
Application Number
8/76064
Publication Number
5372652
Application Date
June 14, 1993
Publication Date
December 13, 1994
Inventor
Jin J Wu
Ossining
NY, US
Kris V Srikrishnan
Wappingers Falls
NY, US
Agent
Richard Lau
Assignee
International Business Machines Corporation
NY, US
IPC
B08B 5/00
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