05362600 is referenced by 19 patents and cites 16 patents.

The invention provides a radiation sensitive composition having a polymer binder of phenolic and cyclic alcohol units. At least a portion of the phenolic units and/or cyclic alcohol units of the polymer are bonded to acid labile groups. High solubility differentials between exposed and unexposed regions are realized with only moderate substitution of the binder with the acid labile groups.

Title
Radiation sensitive compositions comprising polymer having acid labile groups
Application Number
763827
Publication Number
5362600
Application Date
May 25, 1993
Publication Date
November 8, 1994
Inventor
Dianne Canistro
Lancaster
MA, US
James W Thackeray
Braintree
MA, US
Martha M Rajaratnam
Dedham
MA, US
David R Medeiros
Cambridge
MA, US
Richard C Hemond
Brighton
MA, US
Roger Sinta
Woburn
MA, US
Agent
Peter F Corless
Robert L Goldberg
Assignee
Shipley Company
MA, US
IPC
G03C 5/58
G03C 1/54
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