05359285 is referenced by 23 patents and cites 12 patents.

A burn-in apparatus for use in burn-in tests includes a burn-in test container for accommodating a plurality of semiconductor device. Also, the burn-in apparatus includes a measuring device for individually measuring junction temperatures of semiconductor chips of the respective semiconductor device by detecting electric characteristics of temperature sensors built in the semiconductor chips, and a temperature adjusting device for controlling amounts of heat radiation and conduction of the semiconductor chips. The temperature adjusting device, such as device for controlling air flow rates of air nozzles of the container, is controlled by control device on the basis of outputs of the measuring device. Thus, the junction temperatures can be kept within a predetermined temperature range to thereby improve the accuracy of screening tests.

Title
Method and apparatus for varying temperature and electronic load conditions of a semiconductor device in a burn-in test chamber while performing a burn-in test
Application Number
7/914556
Publication Number
5359285
Application Date
July 17, 1992
Publication Date
October 25, 1994
Inventor
Masanori Nishiguchi
Yokohama
JP
Tatsuya Hashinaga
Yokohama
JP
Agent
Cushman Darby & Cushman
Assignee
Sumitomo Electric
JP
IPC
F25B 29/00
G01R 15/12
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