05345292 is referenced by 84 patents and cites 32 patents.

An illumination device, includes a secondary light source forming system having a deflecting member with a conical light deflecting surface for transforming received light into substantially ring-like light, the secondary light source forming system forming a ring-like secondary light source by using the ring-like light; and an optical system for projecting divergent lights from portions of the secondary light source obliquely onto a surface to be illuminated so that the projected lights are superposed one upon another on the surface.

Title
Illumination device for projection exposure apparatus
Application Number
8/40991
Publication Number
5345292
Application Date
March 31, 1993
Publication Date
September 6, 1994
Inventor
Shigeru Hayata
Kodaira
JP
Hiroyuki Ishii
Yokohama
JP
Masato Muraki
Inagi
JP
Takahisa Shiozawa
Kawasaki
JP
Agent
Fitzpatrick Cella Harper & Scinto
Assignee
Canon Kabushiki Kaisha
JP
IPC
G03B 27/42
G03B 27/54
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