05335044 is referenced by 42 patents and cites 8 patents.

A projection type exposure apparatus comprises:

Title
Projection type exposure apparatus and method of exposure
Application Number
8/20775
Publication Number
5335044
Application Date
February 22, 1993
Publication Date
August 2, 1994
Inventor
Naomasa Shiraishi
Kawasaki
JP
Agent
Shapiro and Shapiro
Assignee
Nikon Corporation
JP
IPC
G03B 27/42
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