05324488 is referenced by 31 patents and cites 7 patents.

In the Czochralski crucible pulling of crystal ingots, in particular those of silicon and having particularly large crystal diameters, the degree of filling of the crucible is kept approximately constant during the pulling process by continuously adding solid or liquid recharging material. According to the invention, the known disadvantages of thermal disturbances and the introduction of impurities and particles are overcome by a recharging system with a gas-tight seal, comprising additional crucible, stock container for semiconductor material and dopant having the appropriate feedlines and an exhaust gas line. In addition, the process makes possible a regulatable and separate recharging of dopant via the additional crucible.

Title
Continuous liquid silicon recharging process in czochralski crucible pulling
Application Number
829402
Publication Number
5324488
Application Date
June 7, 1993
Publication Date
June 28, 1994
Inventor
Reinhard Lang
Burghausen
DE
Herbert Klingshirn
Burghausen
DE
Agent
Collard & Roe
Assignee
Wacker Chemitronic Gesellschaft fur Elektronik Grundstoff m b H
DE
IPC
B01D 9/00
View Original Source