05310410 is referenced by 107 patents and cites 7 patents.

A method wherein wafers are transferred between a loading chamber and a central vacuum chamber. A plurality of first vacuum processing chambers are disposed in a satellite relationship around the central chamber. A plurality of second non-vacuum chambers are interspersed with the first chambers in a satellite relationship around the central chamber. A second central vacuum chamber communicates with one of the first chambers through a valve. Third and fourth pluralities of chambers are disposed in a satellite relationship around the second central chamber to respectively perform functions similar to those performed by the first and second chambers, the fourth chambers being interspersed with the third chambers.

Title
Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatus
Application Number
505596
Publication Number
5310410
Application Date
December 13, 1991
Publication Date
May 10, 1994
Inventor
Peter J Clarke
Santa Barbara
CA, US
Robert G Begin
Montecito
CA, US
Agent
Charles H Schwartz
Ellsworth R Roston
Assignee
Sputtered Films
CA, US
IPC
C23C 13/08
C23C 16/00
C23C 14/00
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