05305054 is referenced by 66 patents and cites 15 patents.

An imaging method for imaging a fine pattern having linear features extending along orthogonal first and second directions is disclosed, which method is characterized by: providing a light source having decreased intensity portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the first and second directions, respectively; and illuminating the pattern with light from the light source.

Title
Imaging method for manufacture of microdevices
Application Number
7/836509
Publication Number
5305054
Application Date
February 18, 1992
Publication Date
April 19, 1994
Inventor
Miyoko Noguchi
Tokyo
JP
Akiyoshi Suzuki
Tokyo
JP
Agent
Fitzpatrick Cella Harper & Scinto
Assignee
Canon Kabushiki Kaisha
JP
IPC
G03B 27/42
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