05286296 is referenced by 167 patents and cites 13 patents.

In a multi-chamber process equipment in which a plurality of process chambers for processing a single wafer are connected with a wafer transfer chamber in parallel through respective gate valves, and a wafer transfer means is provided for carrying the wafer between the wafer transfer chamber and each process chamber through one of the gate valves, there are further provided a plurality of vacuum pumps in order to prevent cross contamination among processes, improve throughput and prevent condensation in the process chambers. The vacuum pumps are connected with the wafer transfer chamber, and designed to reduce the pressure in the wafer transfer chamber to different vacuum levels. Therefore, the degree of vacuum in the wafer transfer chamber can be set at a desired value according to the process chamber to be opened, by operating the vacuum pumps properly, so that cross contamination between the wafer transfer chamber and the process chambers is prevented effectively.

Title
Multi-chamber wafer process equipment having plural, physically communicating transfer means
Application Number
7/818535
Publication Number
5286296
Application Date
January 9, 1992
Publication Date
February 15, 1994
Inventor
Hiroshi Komatsu
Kanagawa
JP
Toshiaki Hasegawa
Kanagawa
JP
Junichi Sato
Tokyo
JP
Agent
Hill Steadman & Simpson
Assignee
Sony Corporation
JP
IPC
A61K 27/02
C23C 16/00
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