05283437 is referenced by 51 patents and cites 5 patents.

A scanning tunneling microscope is disclosed with the probe tip formed as an integral part of a membrane. A counter-electrode is formed on the membrane and four electrodes are provided spaced apart from the counter-electrode. The tip is scanned by means of these electrodes. Coarse positioning of the tip along the Z axis is done by applying pressure or vacuum to the membrane. Also disclosed is the method of making the scanning tunneling microscope.

Title
Pneumatically and electrostatically driven scanning tunneling microscope
Application Number
811635
Publication Number
5283437
Application Date
February 17, 1993
Publication Date
February 1, 1994
Inventor
Olaf Wolter
Aidlingen
DE
Martin Nonnenmacher
Schonaich
DE
Johann Greschner
Pliezhausen
DE
Agent
Robert M Trepp
J D Ellett Jr
Assignee
International Business Machines Corporation
NY, US
IPC
H01J 37/28
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