05276672 is referenced by 57 patents and cites 16 patents.

A micro-displacement type information detection probe device capable of following all of the undulation on the .mu.m order, and the periodical surface unevenness on the nm order, of the recording medium or the substrate in performing recording and/or reproduction, by use of, for example, tunnel current, is provided. By forming a cantilever of the first stage by extending the insulation layer laminated on the substrate, providing a lalyer structure having a piezoelectric material sandwiched between the electrode members on the cantilever of the first stage, forming further a cantilever of the second stage on the extension from the tip end of the first cantilever having said layer structure and also forming an information detection probe at the free end of the cantilever of said second stage, and utilizing the reverse piezoelectric effect formed by application of a voltage between the electrodes of said layer structure, the cantilever of the above first stage is displaced.

Title
Micro-displacement type information detection probe device and scanning tunneling microscope, atomic force microscope, information processing device by use thereof
Application Number
7/744521
Publication Number
5276672
Application Date
August 13, 1991
Publication Date
January 4, 1994
Inventor
Katsuhiko Shinjo
Isehara
JP
Toshimitsu Kawase
Atsugi
JP
Ryo Kuroda
Machida
JP
Hiroyasu Nose
Zama
JP
Toshihiko Miyazaki
Hiratsuka
JP
Agent
Fitzpatrick Cella Harper & Scinto
Assignee
Canon Kabushiki Kaisha
JP
IPC
G11B 9/00
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