05259881 is referenced by 160 patents and cites 14 patents.

A wafer processing cluster tool, having one or more load-locks, is provided with one or more batch preheating modules that receive wafers only from the cluster tool transport module at the internal vacuum pressure of the machine. The loading, unloading, handling and processing of wafers in the machine can occur while other wafers are being preheated. The preheat module has a vertically moveable rack and is loaded with various sized batches of wafers with no vacant positions between them. Wafer shaped shields may occupy positions adjacent top and bottom wafers to cause them to heat the same as other wafers in the rack. Infrared lamps positioned outside of quartz windows heat wafers in the preheat module. The rack may rotate to improve heating uniformity. Temperature sensors, such as pyrometers, that do not contact the wafers being preheated, measure temperature for control of the heating of the lamps.

Title
Wafer processing cluster tool batch preheating and degassing apparatus
Application Number
7/701800
Publication Number
5259881
Application Date
May 17, 1991
Publication Date
November 9, 1993
Inventor
Hiroichi Ishikawa
Mahwah
NJ, US
Michael S Kolesa
Suffern
NY, US
Richard C Edwards
Ringwood
NJ, US
Agent
Donald F Frei
Assignee
Materials Research Corporation
NY, US
IPC
C23C 16/00
H01L 21/02
H01L 21/00
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