05252835 is referenced by 152 patents.

An atomic force microscope (AFM) has been used to machine complex patterns and to form free structural objects in thin layers of MoO.sub.3 grown on the surface of MoS.sub.2. The AFM tip can pattern lines with .ltoreq.10 nm resolution and then image the resulting structure without perturbation by controlling the applied load. Distinct MoO.sub.3 structures can also be defined by AFM machining, and furthermore, these objects can be manipulated on the MoS.sub.2 substrate surface using the AFM tip. These results suggest application to nanometer scale diffraction gratings, high-resolution lithography masks, and possibly the assembly of nanostructures with novel properties.

Title
Machining oxide thin-films with an atomic force microscope: pattern and object formation on the nanometer scale
Application Number
7/916215
Publication Number
5252835
Application Date
July 17, 1992
Publication Date
October 12, 1993
Inventor
Yun Kim
Cambridge
MA, US
Charles M Lieber
Lexington
MA, US
Agent
Hamilton Brook Smith & Reynolds
Assignee
President and Trustees of Harvard College
MA, US
IPC
G21K 5/10
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