05249371 is referenced by 9 patents and cites 3 patents.

A purpose of this invention is to provide a vapor drier which can continue a process to dry efficiently objects in an extremely clean condition for a long time. A vapor drier of this invention comprises a circulating/dehydrating/refining means for refining said volatile processing liquid stored in said processing room and circulating refined fluid into said processing room, said circulating/dehydrating/refining means having at least an evaporating section to evaporate said volatile processing liquid stored in said processing room, a dehydrating section to remove water from said vapor generated in said evaporating section with a dehydrating/separating membrane, and a distilling section to distill said dehydrated vapor.

Title
Vapor drier
Application Number
7/779026
Publication Number
5249371
Application Date
October 18, 1991
Publication Date
October 5, 1993
Inventor
Masao Kikuchi
Ichihara
JP
Kohei Ninomiya
Ichihara
JP
Masaru Umeda
Tokyo
JP
Yoshio Saito
Ohme
JP
Agent
Baker & Daniels
Assignee
Kabushiki kaisha Hitachi Seisakusho
JP
IPC
F26B 21/06
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