05248876 is referenced by 377 patents and cites 32 patents.

A confocal imaging system utilizes an opaque mask with a slit and a row of pinpoint sensors or utilizes an opaque mask with a skewed pattern of pinholes and an array of isolated pinpoint sensors in a matching pattern in order to obtain sufficient data to provide a complete image for imaging and/or inspecting an object such as electronics in a single one-dimensional scan. The system also simultaneously produces multiple images at different heights in the single one-dimensional scan of the viewed object, and also simultaneously produces images taken in different spectral bands in the same one-dimensional scan of the object to be imaged and/or inspected. The relative height or depth of the different images can be modified by simply adjusting the inclination between the confocal imaging system and a path followed by the object that is to be imaged and/or inspected during the one-dimensional scan. The optical confocal imaging system requires no moving parts and the only moving parts of the system are for motorized conveying of the object to be imaged and/or inspected along the path. In one arrangement of the confocal imaging system, color imaging and/or inspecting of the object can be performed. In another arrangement of the confocal imaging system, simultaneous brightfield and darkfield imaging and/or inspecting of an object can be performed.

Title
Tandem linear scanning confocal imaging system with focal volumes at different heights
Application Number
7/871458
Publication Number
5248876
Application Date
April 21, 1992
Publication Date
September 28, 1993
Inventor
Frederick Y Wu
Cos Cob
CT, US
Jon R Mandeville
Redmond
WA, US
Pieter J Kerstens
Beacon
NY, US
Agent
Whitham & Marhoefer
Assignee
International Business Machines Corporation
NY, US
IPC
G01B 11/24
G01N 21/86
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