05213451 is referenced by 58 patents and cites 10 patents.

The separation of thin disk-type workpieces from a stack has, as a rule, hitherto been carried out by hand. An apparatus and a corresponding method are now provided which make it possible to lift the wafer off the stack without mechanical contact, and also to convey the separated wafers to the tray and to introduce them in an automated way without damage. In this method, a stack of disk-type workpieces is introduced into a wafer magazine with a feed unit which brings the uppermost wafer of the wafer stack into the sphere of action of a fluid medium which emerges under pressure in a preferred direction from a nozzle system. A dam makes it possible to remove a single wafer. The apparatus and the method make possible separation without damage while increasing the yield. In conjunction with a conveying apparatus, an apparatus for tray filling processing lines can be built up for automatically treating disk-type workpieces without damage.

Title
Apparatus and method of automatically separating stacked wafers
Application Number
7/818553
Publication Number
5213451
Application Date
January 9, 1992
Publication Date
May 25, 1993
Inventor
Gerhard Spatzier
Eggelsberg
AT
Albert Pemwieser
Ach
AT
Walter Frank
Burgkirchen
DE
Agent
Collard & Roe
Assignee
Wacker Chemitronic Gesellschaft fur Elektronik Grundstoffe mbH
DE
IPC
B65G 51/03
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