05181556 is referenced by 23 patents and cites 5 patents.

A method and apparatus are disclosed using a combination of convection and conduction cooling to cool an article in an evacuated environment. A processing chamber is used which includes at least one heat sink. A flat surface of the article to be cooled is positioned within the chamber in a spaced apart facing parallel relationship to a facing surface of the heat sink. High conductivity gases are admitted into the chamber to accomplish cooling of the article.

Title
System for substrate cooling in an evacuated environment
Application Number
7/763355
Publication Number
5181556
Application Date
September 20, 1991
Publication Date
January 26, 1993
Inventor
John L Hughes
Rodeo
CA, US
Agent
Stanley Z Coles
Assignee
Intevac
CA, US
IPC
F23F 23/00
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