05179499 is referenced by 67 patents and cites 11 patents.

Mechanically movable microstructure fabricated from a single crystal such as silicon and actuator structures for providing a high degree of controlled, precision motion of nanometer-scale.

Title
Multi-dimensional precision micro-actuator
Application Number
7/868102
Publication Number
5179499
Application Date
April 14, 1992
Publication Date
January 12, 1993
Inventor
Jun J Yao
Ithaca
NY, US
Noel C MacDonald
Ithaca
NY, US
Agent
Jones Tullar & Cooper
Assignee
Cornell Research Foundation
NY, US
IPC
H01L 21/306
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