05178639 is referenced by 57 patents and cites 6 patents.

A vertical heat-treating apparatus which is effective for preventing dust or fine particles from being attached to a wafer during the loading/unloading or transport of the wafer thereby to manufacture a high-quality wafers. This apparatus comprises a carrier stocker storing a plurality of wafer carriers, a loading/unloading mechanism for transferring the wafers between the wafer carriers and a heat-treating vessel, a plurality of heat-treating furnaces for heat-treating the wafers, a transport mechanism for transporting the heat-treating vessel to and from the vertical heat-treating furnace, and gas supply means for forming a clear gas stream passing exclusively through the loading/unloading mechanism and/or the transport mechanism.

Title
Vertical heat-treating apparatus
Application Number
7/723382
Publication Number
5178639
Application Date
June 28, 1991
Publication Date
January 12, 1993
Inventor
Hironobu Nishi
Sagamihara
JP
Agent
Oblon Spivak McClelland Maier & Neustadt
Assignee
Tokyo Electron Sagami
JP
IPC
H01L 21/69
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