05172050 is referenced by 220 patents and cites 9 patents.

A semiconductor probe card having a plurality of micromachined probes tips for contacting an array of electrode pads formed on a semiconductor integrated circuit is provided. The plurality of probe tips are formed on the top surface of the substrate wherein the probe tips are arranged in an array matching of electrode pads on the integrated circuit to be tested. A portion of the semiconductor substrate underneath the probe tips is thin, so that the probe tips rests on a flexible diaphragm or beam.

Title
Micromachined semiconductor probe card
Application Number
7/655705
Publication Number
5172050
Application Date
February 15, 1991
Publication Date
December 15, 1992
Inventor
Mavin Swapp
Mesa
AZ, US
Agent
Stuart T Langley
Assignee
Motorola
IL, US
IPC
B44C 1/22
G01R 1/02
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