05159267 is referenced by 82 patents and cites 7 patents.

A fluxmeter which provides for a pneumatic apparatus for measuring an amount of plasma energy flux flowing into a semiconductor wafer provides for a non-electrical apparatus of measuring energy flux. A bulb has one end exposed to the plasma while the opposite end is supported by a heat sink. When plasma is applied, gas pressure in the bulb changes due to a change in temperature. This change in gas pressure is measured to provide a direct correlation to a value of energy flux impinging on the fluxmeter.

Title
Pneumatic energy fluxmeter
Application Number
590198
Publication Number
5159267
Application Date
April 2, 1992
Publication Date
October 27, 1992
Inventor
Richard L Anderson
Austin
TX, US
Agent
William W Kidd
Assignee
Sematech
TX, US
IPC
H01L 21/306
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