05155336 is referenced by 158 patents and cites 24 patents.

A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.

Title
Rapid thermal heating apparatus and method
Application Number
467808
Publication Number
5155336
Application Date
October 24, 1991
Publication Date
October 13, 1992
Inventor
James F Gibbons
Palo Alto
CA, US
Christian M Gronet
Palo Alto
CA, US
Agent
Aldo J Test
Assignee
Applied Materials
CA, US
IPC
F27B 5/14
F27D 11/02
H05B 3/62
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