05147493 is referenced by 41 patents and cites 9 patents.

A plasma generating apparatus comprising a transformer including a primary winding connected to a high frequency power source and a secondary winding having two end terminals and a plurality of tap terminals connected between the end terminals, the transformer being adapted to deliver first and second high frequency electric powers with a phase difference of 180.degree. from the end terminals, upper and lower electrodes disposed in a vacuum chamber so as to be opposed at a distance from each other and supplied with the first and second high frequency powers, respectively, and a power ratio selector for switching the tap terminals to select the ratio between the first and second high frequency powers supplied to the electrodes, wherein a to-be-processed object placed on the lower electrode is processed by means of plasma formed between the electrodes.

Title
Plasma generating apparatus
Application Number
7/714231
Publication Number
5147493
Application Date
June 12, 1991
Publication Date
September 15, 1992
Inventor
Yukio Naitou
Kofu
JP
Kazuhiko Sugiyama
Hachioji
JP
Akihito Toda
Yamanashi
JP
Eiichi Nishimura
Yamanashi
JP
Agent
Oblon Spivak McClelland Maier & Neustadt
Assignee
Tokyo Electron Yamanashi
JP
Tokyo Electron
JP
IPC
H01L 21/00
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