05144362 is referenced by 60 patents and cites 6 patents.

A projection aligner includes a light source, a condenser lens system for directing light from the light source onto a mask on which a circuit pattern is formed, a projecting lens system for collecting on the surface of a wafer the light transmitted through the mask, and a pupillary member disposed on a pupillary surface of the projecting lens system. The pupillary member includes at least one transmitting zone for transmitting the light transmitted through the mask including a phase shift member for producing a predetermined phase shift in light transmitted through part of the transmitting zone.

Title
Projection aligner
Application Number
7/790446
Publication Number
5144362
Application Date
November 12, 1991
Publication Date
September 1, 1992
Inventor
Masaaki Tanaka
Amagasaki
JP
Yoshie Noguchi
Amagasaki
JP
Teruo Miyamoto
Amagasaki
JP
Yasuhito Myoi
Amagasaki
JP
Kazuya Kamon
Itami
JP
Agent
Leydig Voit & Mayer
Assignee
Mitsubishi Denki Kabushiki Kaisha
JP
IPC
G03B 27/42
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