05128232 is referenced by 70 patents and cites 10 patents.

A photoresist that utilizes a copolymer of a phenol and a cyclic alcohol having increased optical transmission properties relative to photoresists using fully aromatic phenolic resins. Preferred binders are hydrogenated novolak resins and hydrogenated polyvinyl phenol resins.

Title
Photoresist composition with copolymer binder having a major proportion of phenolic units and a minor proportion of non-aromatic cyclic alcoholic units
Application Number
7/354800
Publication Number
5128232
Application Date
May 22, 1989
Publication Date
July 7, 1992
Inventor
Roger Sinta
Woburn
MA, US
George W Orsula
Tewksbury
MA, US
James Thackeray
Braintree
MA, US
Assignee
Shiply Company
MA, US
IPC
G03C 1/492
G03C 1/52
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