05121256 is referenced by 503 patents and cites 3 patents.

A lithography system employing a solid immersion lens having a spherical surface to enhance its resolution is disclosed.

Title
Lithography system employing a solid immersion lens
Application Number
7/669200
Publication Number
5121256
Application Date
March 14, 1991
Publication Date
June 9, 1992
Inventor
Scott M Mansfield
San Mateo County
CA, US
Gordon S Kino
Santa Clara County
CA, US
Timothy R Corle
Santa Clara County
CA, US
Agent
Flehr Hohbach Test Albritton & Herbert
Assignee
The Board of Trustees of the Leland Stanford Junior University
CA, US
IPC
G02B 7/02
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