05107114 is referenced by 34 patents and cites 6 patents.

A fine scanning mechanism for an atomic force microscope includes a three-dimensionally displaceable cylindrical piezolectric element, a first probe attaching portion attached to an end of the said cylindrical piezoelectric element, a first probe attached to the first probe attaching portion, a bimorph piezoelectric element attaching portion attached to the end of the cylindrical piezoelectric element, a one-dimensionally displaceable bimorph piezoelectric element attached to the bimorph piezoelectric element attaching portion, a cantilever attaching portion attached to a side of the one-dimensionally displaceable bimorph piezoelectric element, the cantilever having a displacement portion and being attached to the cantilever attaching portion, a second probe attaching portion attached to a side of the displacement portion of the cantilever, a second probe attached to the second probe attaching portion, and a stationary sample tray disposed opposite the second probe.

Title
Fine scanning mechanism for atomic force microscope
Application Number
7/685434
Publication Number
5107114
Application Date
April 15, 1991
Publication Date
April 21, 1992
Inventor
Hiroshi Koyama
Itami
JP
Takao Yasue
Itami
JP
Tadashi Nishioka
Itami
JP
Agent
Leydig Voit & Mayer
Assignee
Mitsubish Denki Kabushiki Kaisha
JP
IPC
H01J 37/26
View Original Source