05105305 is referenced by 214 patents and cites 8 patents.

A novel probe, useful for near-field optical scanning microscopy, is provided. The probe has a fine tip which includes fluorescent material. In one embodiment, the invention is an apparatus which includes such a probe, means for exciting and detecting fluorescence in the probe tip, means for positioning the probe tip near the surface of a sample, and means for displacing the probe tip relative to the sample. In a second embodiment, the invention is a manufacturing method in which the novel probe is used to measure a characteristic dimension of a patterned workpiece.

Title
Near-field scanning optical microscope using a fluorescent probe
Application Number
7/639629
Publication Number
5105305
Application Date
January 10, 1991
Publication Date
April 14, 1992
Inventor
Jay K Trautman
Bedminster
NJ, US
Robert E Betzig
Chatham
NJ, US
Agent
E E Pacher
M I Finston
Assignee
AT&T Bell Laboratories
NJ, US
IPC
G02B 21/06
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