05097800 is referenced by 91 patents and cites 66 patents.

A high speed apparatus for forming capacitors includes a vacuum chamber in which is located a carrier defining a continuous surface configured to move at a rate of from about 150 feet per minute to about 600 feet per minute during the forming operation, a metal depositing device, a dielectric depositing device, and a radiation source. The metal depositing device is configured to deposit layers of metal onto the moving surface, and the dielectric depositing device includes (a) a device for atomizing a radiation-curable polyfunctional acrylic monomer to form liquid droplets of the monomer, (b) a heated surface on which the atomized monomer droplets impinge and are flash vaporized, and (c) device for thereafter condensing the flash-vaporized monomer on the metal layers to form a monomer coating on successive layers. The radiation source is positioned for curing successive monomer coatings after each such coating has been deposited, to thereby form a polymer dielectric layer. Apparatus are provided for controlling each of the devices so that metal is deposited, a monomer coating is deposited, and the monomer coating is cured to form the polymer dielectric layer before the continuous surface passes the devices again for successive metal layers, monomer coatings, and curings.

Title
High speed apparatus for forming capacitors
Application Number
562779
Publication Number
5097800
Application Date
July 10, 1990
Publication Date
March 24, 1992
Inventor
Mooyoung Ham
Glens Falls
NY, US
Donald S Strycker
Glens Falls
NY, US
Angelo Yializis
South Glens Falls
NY, US
David G Shaw
Glens Falls
NY, US
Agent
Christie Parker & Hale
Assignee
Spectrum Control
PA, US
IPC
C23C 16/44
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