05096388 is referenced by 274 patents and cites 5 patents.

A micro machined micro pump capable of flow rates on the level of microliters per minute formed by micro machining of a semiconductor material such as silicon with a set of channels or passages and having a semiconductor membrane interacting with the pattern of channels and passages and under selective control of activating means to induce traveling wave type motion of said membrane that creates pump action between inlet and outlet ones of the passages. To induce the pump action motion of the membrane electrical conductors can be applied to the membrane in a pattern which, when selectively activated interact with an electric or magnetic field to produce such motion. Alternatively piezolelectric or other electrostrictive mechanisms may be employed to induce the appropriate membrane motion.

Title
Microfabricated pump
Application Number
7/497392
Publication Number
5096388
Application Date
March 22, 1990
Publication Date
March 17, 1992
Inventor
Marc S Weinberg
Needham
MA, US
Agent
Weingarten Schurgin Gagnebin & Hayes
Assignee
The Charles Stark Draper Laboratory
MA, US
IPC
F04B 17/00
F04B 43/14
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