05076205 is referenced by 164 patents and cites 41 patents.

A system for multichamber processing of semiconductor wafers providing flexibility in the nature of processing available in a multi processing facility. To accommodate changing processing demands and chamber replacement, a mobile processing chamber selectively docks with a multiple chamber system to form one of its processing chambers. The capabilities of the multiprocessing multichamber system are enhanced by extending the system to other multichamber systems through intermediate buffer storage wafer cassette and elevator systems. The extending multichamber system is further provided with intermediate access wafer storage elevator cassettes.

Title
Modular vapor processor system
Application Number
7/294278
Publication Number
5076205
Application Date
January 6, 1989
Publication Date
December 31, 1991
Inventor
Joseph D Napoli
Windham
NH, US
Joseph A Maher
Wenham
MA, US
E John Vowles
Deering
NH, US
Agent
Weingarten Schurgin Gagnebin & Hayes
Assignee
General Signal Corporation
CT, US
IPC
C23C 16/00
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