05073912 is referenced by 44 patents and cites 8 patents.

A sample moving apparatus for positioning wafers with high accuracy, which apparatus comprises a fine adjustment actuator having a drive stroke to finely move the wafer, a fine adjustment stage driven by the fine adjustment actuator, a coarse adjustment actuator having a drive stroke to relatively coarsely move the wafer, a coarse adjustment stage driven by the coarse adjustment actuator, and a holder arrangement for attractively holding the wafer onto the wafer bearing surfaces of the respective stages. Upon selective energization of the holder arrangement of the respective stages, the wafer is moved while being attracted to the coarse adjustment stage or while being attracted to the coarse adjustment stage.

Title
Sample moving apparatus, sample moving system and semiconductor manufacturing apparatus
Application Number
7/436036
Publication Number
5073912
Application Date
November 14, 1989
Publication Date
December 17, 1991
Inventor
Hiromu Hirai
Tsukuba
JP
Kenji Mori
Tsuchiura
JP
Yosuke Hamada
Ibaraki
JP
Isao Kobayashi
Ibaraki
JP
Agent
Antonelli Terry Stout & Kraus
Assignee
Hitachi
JP
IPC
G71K 5/10
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