05069419 is referenced by 125 patents and cites 5 patents.

A semiconductor microactuator has a silicon semiconductor substrate having suspension means connected thereto. The suspension means has a first layer of material having a first thermal expansion coefficient and a second layer of material having a second thermal expansion different than the first thermal expansion coefficient and may be a part of a diaphragm or a pair of connecting members. A movable element, which may be a second part of the diaphragm or a boss, is connected to the suspension to be displaced thereby as the temperature of the first and second layers of material is varied. The displacement is solely irrotational with respect to the semiconductor substrate.

Title
Semiconductor microactuator
Application Number
7/370545
Publication Number
5069419
Application Date
June 23, 1989
Publication Date
December 3, 1991
Inventor
John H Jerman
Palo Alto
CA, US
Agent
Fitch Even Tabin & Flannery
Assignee
IC Sensors
CA, US
IPC
F03G 7/06
G01B 9/02
F16K 31/02
F16K 7/14
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