05038322 is referenced by 65 patents and cites 13 patents.

A method of and a device for sub-micron deforming a surface (15) is described, for example for the purpose of inscribing information. During scanning of the surface the tip (14) of a scanning tunneling microscrope is held at a constant distance from the surface by means of a negative feedback control loop (18) which is controlled by a tunneling current (It) between the tip and the surface, and for forming a pit (21) in the surface (15). The control loop is deactivated and a tip height drive member (8) is energized by means a control voltage (Vpz) whose amplitude increases as a function of time and which has a predetermined final value, such that the tip is lowered into the material.

Title
Method of and device for sub-micron processing a surface
Application Number
7/306367
Publication Number
5038322
Application Date
February 3, 1989
Publication Date
August 6, 1991
Inventor
Evert J Van Loenen
Eindhoven
NL
Agent
Paul R Miller
Assignee
U S Philips Corporation
NY, US
IPC
G01N 23/225
G01N 23/00
G11C 13/00
G11C 11/34
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