05025346 is referenced by 348 patents and cites 2 patents.

A microbridge device for use as a sensor or an actuator is driven parallel to a substrate as a resonant microstructure. The microstructure comprises a stationary thin-film electrode secured to the substrate and located in a plane above it. A movable plate overlaying the substrate is suspended above it. The movable plate and electrode are patterned to provide for each at least one comb with fingers interdigitated with those of the other.

Title
Laterally driven resonant microstructures
Application Number
7/312642
Publication Number
5025346
Application Date
February 17, 1989
Publication Date
June 18, 1991
Inventor
Roger T Howe
Lafayette
CA, US
William C Tang
Emeryville
CA, US
Agent
Owen Wickersham & Erickson
Assignee
Regents of the University of California
CA, US
IPC
G01P 15/08
H01G 7/00
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