05022745 is referenced by 350 patents and cites 2 patents.

An electrostatically deformable single crystal mirror comprising a highly conducting thick substrate layer and a highly conducting thin membrane layer separated from the thick layer by an insulator is disclosed. The center of the insulating layer is etched to form a cavity. The outer surface of the membrane layer is polished and coated with a dielectric to form a mirror. A voltage is applied between the membrane and the substrate to cause the membrane to deform. Various embodiments of the invention provide for planar translation of the mirror and for convex/concave deformation of the mirror. Incorporation of a deformation sensor in the deformable mirror allows for deformation measurement. In a particular embodiment of the invention, the deformable mirror is used in a tunable etalon for use in an optical filter.

Title
Electrostatically deformable single crystal dielectrically coated mirror
Application Number
7/404176
Publication Number
5022745
Application Date
September 7, 1989
Publication Date
June 11, 1991
Inventor
Aram Mooradian
Winchester
MA, US
John J Zayhowski
Pepperell
MA, US
Agent
Hamilton Brook Smith & Reynolds
Assignee
Massachusetts Institute of Technology
MA, US
IPC
H01L 29/04
G02B 5/10
View Original Source